Application Note: Prediction And Prevention Of Failures In Semiconductor Bulk Gas Distribution Systems

Semiconductor facilities consume vast quantities of high purity gases in the production of high end solid state devices. The purified nitrogen, argon, oxygen, helium and hydrogen gases used in various semiconductor manufacturing processes are collectively referred to as either bulk gases or house gases. House gases are typically distributed throughout a semiconductor manufacturing facility via gas distributions systems comprised of electropolished stainless steel tubing and other gas handling components designed for ultra high purity (UHP) applications.

To maintain the highest possible manufacturing yields from processes where bulk gases are consumed, highly sophisticated gas analyzers are used to verify bulk gas purity from the source. Each gas purity monitor is finely tuned to measure one or more potential contaminants, any of which can be present in the event of a system failure whether this is due to mechanical break down or human error.