Brochure | October 26, 2007

Product Brochure: Brooks®/MSP 2800 Turbo-Vaporizer System

The Brooks®/MSP Turbo-Vaporizer™ System is used for superior direct liquid-inject vacuum film coating in processes such as Atomic Layer Deposition (ALD) and MOCVD. Carrier gas that is heated to the vaporization temperature of the liquid quickly vaporizes the atomized liquid. This results in low temperature, gentle vaporization that produces a very pure vapor.
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