Product Sheet: Brooks®/MSP 2800 Turbo-Vaporizer System

The heart of the Brooks/MSP Turbo-Vaporizer is its unique 2-stage vaporization. First, the precursor liquid passes through an ultra-fine droplet atomizer that yields 2 to 5 micron droplets. These small, uniform droplets are then vaporized in a turbo mixer by carrier gas, controlled by a Brooks flow controller, that has been heated to the vaporization temperature of the liquid; vaporization is virtually instantaneous (~10 microseconds).