Datasheet | July 14, 2006

Datasheet: CG1100-RTP Oxygen Analyzer

The CG1100-RTP oxygen analyzer is one of a growing range of products offered by AMETEK for the semiconductor industry. Specifically developed for the industry's rapid thermal processing (RTP) wafer fabrication systems, the CG1100-RTP oxygen analyzer meets the special requirements for use on RTP tools and has been integrated by leading semiconductor tool manufacturers into their latest RTP and Mini-Batch systems.
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