Datasheet: CG1000-RTP Oxygen Analyzer

The Dycor CG1000-RTP Oxygen Analyzer improves your yield by detecting oxygen contamination at the parts-per-million level. Rapid Thermal Processing (RTP) and fast ramp mini-batch furnaces represent a major technological shift in semi-conductor fabrication technology. The advantages offered by these processes however, can quickly be negated if there is not positive protection from the damaging effects of oxygen contamination.