SLA5800 Series: Elastomer Seal Meter/Controller

The Brooks SLA Series mass flow meters and controllers encompasses the Delta and Smart II electronics yielding Brooks' premiere smart digital thermal mass flow platform. The devices link to advanced service tools and the S-Series RS-485 protocol. SLA also offers the advantage of digital protocols and new features.

Brooks Instrument's SLA5800 Series is an elastomer sealed digital thermal mass flow measurement and control instrument, which offers unparalleled flexibility and performance. The SLA5800 Series MFC is designed for use in advanced gas handling systems. The result is the most accurate, repeatable, and responsive MFC on the market today!

The SLA5800 Series covers an extremely broad range of flowrates. Model SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 50:1, accurate gas flow can be measured or controlled down to 0.06 ccm! Model SLA5853 can meter or control gas flow up to 2500 lpm.

GENERAL FEATURES

• Wide FS flow range for measurement and control of gases from <3 ccm to 2500 lpm (N2 equivalent)
• Accuracy up to 1200 lpm: ±1.0% of rate (20%-100% FS) ±0.2% FS (below 20% FS) 1200-2500 lpm: ±1% FS including linearity. (at calibration conditions).
• Industry leading sensor stability. Long term drift performance of < 0.2% per year. Increased system throughput by reducing maintenance and eliminating periodic recipe adjustment.
• Storage of up to 10 selectable calibration curves. Spares inventories are reduced by limiting the number of individual MFC/M's required, lowering inventory holding costs.
• Elastomer downport process connection option conforms to ANSI/ISA SP-76 standard to offer simplified installation and maintenance in an efficient footprint.
• For use in Pharmaceutical Coating and Tablet Coating applications.