Thermal Mass Flow Meters/Controllers - 4800 Series

Model:
4800 Series

The Brooks® 4800 Series of mass flow meters and controllers is an excellent choice for measurement and control of many common gases. It offers a broad flow range, fast response time, compact size, and many other benefits for a variety of applications. The 4800 Series utilizes a Micro Electric Mechanical (MEMS) based thermal sensor that achieves extremely fast response times. It is ideally suited for OEMs.

• Wide FS flow range for measurement and control of common gases from 50 mln/min to 40 ln/min (50 sccm to 40 slpm)
• Accuracy options: ±1% FS or ±3% FS
• Compact size reduces space and eases installation
• Fast response time of <300 msec
• Storage of up to 9 selectable gas calibrations allows reduction in spares inventory