CG1000-RTP Oxygen Analyzer

Rapid Thermal Processing (RTP) and fast ramp mini-batch furnaces represent a major technological shift in semi-conductor fabrication technology. The advantages offered by these processes however, can quickly be negated if there is not positive protection from the damaging effects of oxygen contamination.

The importance of oxygen contamination control is best illustrated in the deposition of the titanium silicide used to assure adequate conductivity between the silicon material and the overlaying metal conductor. When oxygen is present during the deposition, it reacts with the titanium and contaminates the process. The Dycor CG1000-RTP Oxygen Analyzer improves your yield by detecting oxygen contamination at the parts-per-million level.

And, it maximizes throughput by ending the purge cycle as soon as the oxygen background is at an acceptable level.

When you initiate a wafer processing cycle, you are assured the process environment meets expectations.

Key Features:

• Fast Response Over A Wide Operating Range. Your system will respond rapidly over an operating range of 0.1 ppm to 100% oxygen. The CG1000 RTP can be used to detect oxygen contamination and monitor the purge cycle.
• Easy To Integrate Into Tool Controller And Data Acquisition System. The CG1000-RTP is equipped with an RS-232 or optional RS-485 port. A simple communications protocol allows efficient integration with the tool controller.
• Analog 4-20 mA outputs and I/0 alarms are available.
• Easy- To-Use, Menu-Driven Software. Your system incorporates user-friendly software with helpful messages so that you can begin to use the CG1000-RTP immediately. Advanced software diagnostics and on-line help simplify operations.
• Electronic Flow Sensor. Your system will reliably monitor the flow of gases into the analyzer even providing a flow alarm should the flow stop. Potential for leaks and the high maintenance associated with mechanical flow meters are virtually eliminated.
• Zirconium Oxide Sensor. Your system will not fail to a zero oxygen reading. It is always protected. Something not possible with other sensor technologies.