CG1100-RTP Oxygen Analyzer
The CG1100-RTP oxygen analyzer is one of a growing range of products offered by AMETEK for the semiconductor industry. Specifically developed for the industry's rapid thermal processing (RTP) wafer fabrication systems, the CG1100-RTP oxygen analyzer meets the special requirements for use on RTP tools and has been integrated by leading semiconductor tool manufacturers into their latest RTP and Mini-Batch systems...
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•Datasheet: CG1100-RTP Oxygen Analyzer
The CG1100-RTP oxygen analyzer is one of a growing range of products offered by AMETEK for the semiconductor industry. Specifically developed for the industry's rapid thermal processing (RTP) wafer fabrication systems, the CG1100-RTP oxygen analyzer meets the special requirements for use on RTP tools and has been integrated by leading semiconductor tool manufacturers into their latest RTP and Mini-Batch systems. The CG1100-RTP oxygen analyzer improves processing yields by detecting oxygen contamination at the parts-per-million level. By providing positive protection from the effects of oxygen contamination and by ending the purge cycle as soon as the oxygen background is at an acceptable level, maximum throughput can be realized.
•Datasheet: CG1100-RTP Oxygen Analyzer
•Datasheet: CG1100-RTP Oxygen Analyzer
The CG1100-RTP oxygen analyzer is one of a growing range of products offered by AMETEK for the semiconductor industry. Specifically developed for the industry's rapid thermal processing (RTP) wafer fabrication systems, the CG1100-RTP oxygen analyzer meets the special requirements for use on RTP tools and has been integrated by leading semiconductor tool manufacturers into their latest RTP and Mini-Batch systems. The CG1100-RTP oxygen analyzer improves processing yields by detecting oxygen contamination at the parts-per-million level. By providing positive protection from the effects of oxygen contamination and by ending the purge cycle as soon as the oxygen background is at an acceptable level, maximum throughput can be realized.
Key Features
- Fast response over a Wide Operating Range – Your system will respond rapidly over an operating range of 0.1 ppm to 100% oxygen. The CG1100-RTP can be used to detect oxygen contamination and monitor the purge cycle.
- Easy to Integrate into Tool Controller and Data Acquisition System – The CG1100-RTP is equipped with an RS-232 and two RS-485 ports. It comes with configurator software for initial setup of operating parameters and accepts user-provided software for efficient integration with the tool controller. Analog-digital outputs and I/O alarms available.
- Electronic Flow Meter and VSO Proportional Solenoid Valve – Work together to automatically control flow, electronically maintaining sample flow rate while enabling use over a range of sample inlet/outlet pressures.
- Zirconium Oxide Sensor – Your system will not fail to zero oxygen reading. It is always protected – something not possible with other sensor technologies.
- Optional System 2000 Software Available – Provides enhanced interface and processing monitoring with graphical user interface for Windows 95/98/2000/NT/XP format.
- Compact – 8" x 8" x 8" cube houses all electronics, RS-232 port, (2) RS-485 ports, I/O port and analog output (4-to-20 mA) isolated.
Click Here To Download:
•Datasheet: CG1100-RTP Oxygen Analyzer